High low vacuum compatible stages precision motor positioning, Zaber

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Zaber also designs and manufactures high performance high vacuum (10-6 Torr) and low vacuum (10-3 Torr) compatible motorized positioning stages.

Here you have the summary charts of the different precision motorized vacuum compatible stage families. We recommend you to select the family(s) of your interest here and then go to Zaber to get all the information: specs, prices, accessories, CADs, etc,...

LINEAR STAGES

	Vacuum	Controller	Travel	Accuracy	Repeatability	Velocity	Centered load	Weight
	Torr	Built-in	mm	µm (unidir)	µm	mm/s (max)	Kg (max)	Kg
X-LRQ-SV2	High, 10^-6	yes	75, 150, 300, 450, 600	15 - 150	< 2.5	35, 205	100	2,27-4,86
LRQ-V2	High, 10^-6	no	75, 150, 300, 450, 600	15 - 150	< 2.5	35, 205	100	2,27-4,86
X-LSM-SV2	High, 10^-6	yes	25, 50, 100, 150, 200	15 - 85	< 3, < 6	24, 100	10	0.39-0.50
LSM-V2	High, 10^-6	no	25, 50, 100, 150, 200	15 - 85	< 3, < 6	24, 100	10	0.39-0.50
LSA-V2	High, 10^-6	no	10, 25	18, 24	< 1	10	2.5, 3	0.10, 0.14
X-LRQ-SV1	Low, 10^-3	yes	75, 150, 300, 450, 600	15 - 150	< 2.5	35, 205	100	2,27-4,86
LRQ-V1	Low, 10^-3	no	75, 150, 300, 450, 600	15 - 150	< 2.5	35, 205	100	2,27-4,86
X-LSM-SV1	Low, 10^-3	yes	25, 50, 100, 150, 200	15 - 85	< 3, < 6	24, 100	10	0.39-0.50
LSM-V1	Low, 10^-3	no	25, 50, 100, 150, 200	15 - 85	< 3, < 6	24, 100	10	0.39-0.50
LSA-V1	Low, 10^-3	no	10, 25	18, 24	< 1	10	2.5, 3	0.10, 0.14

LINEAR ACTUATORS

	Vacuum	Controller	Travel	Accuracy	Repeatability	Velocity	Peak Thrust	Weight
	Torr	Built-in	mm	µm (unidir)	µm	mm/s (max)	N (max)	g
X-NA-SV2	High, 10^-6	yes	25, 50	40, 55	< 1	30	25	0.156, 0.176
X-NA-SV1	Low, 10^-3	yes	25, 50	40, 55	< 1	30	25	0.156, 0.176

VERTICAL ELEVATORS

	Vacuum	Controller	Travel	Accuray	Repeatability	Centered load	Velocity	Weight
	Torr	Built-in	mm	µm (unidir)	µm	Kg (max)	mm/s (max)	g
X-VSR-SV2	High, 10^-6	yes	20, 40	50, 35	< 1	10	48	0.56-0.77
VSR-V2	High, 10^-6	no	20, 40	50, 35	< 1	10	48	0.56-0.77
X-VSR-SV1	Low, 10^-3	yes	20, 40	50, 35	< 1	10	48	0.56-0.77
VSR-V1	Low, 10^-3	no	20, 40	50, 35	< 1	10	48	0.56-0.77

ROTARY STAGES

	Vacuum	Controller	Accuracy	Repeatability	Max. speed	Max. center. load	Stage top diam.	Weight
	Torr	Built-in	⁰ (unidir)	⁰	⁰/s	Kg	mm	Kg
X-RSW60A-SV2	High, 10^-6	yes	0.14	< 0.02	100	20	60	0.72
RSW60A-V2T4	High, 10^-6	no	0.14	< 0.02	100	20	60	0.62
X-RSM40B-SV2	High, 10^-6	yes	0.14	< 0.02	120	5	40	0.3
RSM40B-V2T4	High, 10^-6	no	0.14	< 0.02	120	5	40	0.3
X-RSW60A-SV1	Low, 10^-3	yes	0.14	< 0.02	100	20	60	0.72
RSW60A-V1T4	Low, 10^-3	no	0.14	< 0.02	100	20	60	0.62
X-RSM40B-SV1	Low, 10^-3	yes	0.14	< 0.02	120	5	40	0.3
RSM40B-V1T4	Low, 10^-3	no	0.14	< 0.02	120	5	40	0.3

GONIOMETERS

	Vacuum	Controller	Center rotation	Range	Accuracy	Repeatability	Max. speed	Center. load	Weight
	Torr	Built-in	height, mm	⁰	⁰ (unidir)	⁰	⁰/s	Max, Kg	Kg
X-GSM-SV2	High, 10^-6	yes	40, 60	±10, ±7	0.06	< 0.005	30	3	0.32
GSM-V2	High, 10^-6	no	40, 60	±10, ±7	0.06	< 0.005	30	3	0.32
X-GSM-SV1	Low, 10^-3	yes	40, 60	±10, ±7	0.06	< 0.005	30	3	0.32
GSM-V1	Low, 10^-3	no	40, 60	±10, ±7	0.06	< 0.005	30	3	0.32

Depending on the application, a certain degree of vacuum will be required, some typical:
- Low vacuum motorized positioning: welding (brazing), sintering, mass spectroscopy,...
- High vacuum motorized positioning: equipment and optical manufacturing, thin film coating, SEM microscopy (Scanning Electron Microscopy).

Consideraciones para condiciones de vacío

In order to manufacture vacuum-compatible motorized positioning (and clean and pollutant-free environments), certain aspects must be considered in the production line:
- Degassing (to minimize it, the surface of the material used will be minimized)
- Selection of manufacturing materials (use of materials with low vapor pressure such as stainless steel or aluminum)
- Heat management (in the absence of air, it is necessary to design the components with materials that avoid overheating)
- Virtual trapped gas leaks (minimized with special screws)
- Cable management: Zaber stages are connected daisy-chained in power and control: only one feedthrough for several stages

In addition, each of the components that make up each Zaber product have been degreased and cleaned using isopropylene and ultrasound, and then assembled using clean room gloves and inside a class 100 (ISO class 5) clean room. Products do not leave the clean room until they have been packed in special bags.